Optics within scanning systems must produce precise dynamic responses for successful operations. Entegris scan mirrors made from SUPERSiC® grade materials are lightweight but exceptionally stiff. This provides the characteristics desired under rapid motion conditions. Designs may use open- or closed-back structures for improved rigidity and stability. SUPERSiC® silicon carbide also exhibits excellent thermal properties, which can benefit laser-based applications where energy dissipation is a concern.